光子器件有限元法分析设计平台及硅基微纳光功分器的研究的中期报告【摘要】本中期报告主要介绍了基于有限元法分析设计平台进行硅基微纳光功分器研究的进展情况。报告分为以下几个部分：首先介绍硅基微纳光功分器的基本原理和结构，包括一些常用的光功分器结构，如单模光波导耦合型光功分器、矩形波导耦合型光功分器等；其次，详细介绍了有限元法分析设计平台的搭建过程和主要功能模块；然后，结合具体硅基微纳光功分器的设计，介绍了在有限元法分析设计平台上进行光功分器的设计、分析和优化过程；最后，对目前的研究进展进行了总结，并对未来的工作进行了展望。【关键词】有限元法分析；设计平台；硅基微纳光功分器；优化；分析【Abstract】Thismidtermreportmainlyintroducestheprogressofresearchonsilicon-basedmicro-opticalpowersplitterbasedonfiniteelementanalysisanddesignplatform.Thereportisdividedintothefollowingparts:Firstly,thebasicprincipleandstructureofsilicon-basedmicro-opticalpowersplitterareintroduced,includingsomecommonlyusedpowersplitterstructures,suchassingle-modeopticalwaveguidecouplertypepowersplitter,rectangularwaveguidecouplertypepowersplitter,etc.Secondly,theconstructionprocessandmainfunctionmodulesofthefiniteelementanalysisanddesignplatformareintroducedindetail.Then,combinedwiththedesignofspecificsilicon-basedmicro-opticalpowersplitter,thedesign,analysisandoptimizationprocessofthepowersplitteronthefiniteelementanalysisanddesignplatformisintroduced.Finally,thecurrentresearchprogressissummarized,andthefutureworkisprospected.【Keywords】Finiteelementanalysis;Designplatform;Silicon-basedmicro-opticalpowersplitter;Optimization;Analysis