PMS-PNN-PZT压电厚膜材料的制备及性能研究的中期报告摘要：本文介绍了PMS-PNN-PZT复合压电厚膜材料的制备方法及其性能研究。通过化学溶胶-凝胶法和热处理工艺制备了PMS-PNN-PZT压电厚膜材料。利用X射线衍射仪、扫描电镜和透射电镜对样品的结构和形貌进行了表征。结果表明，制备的PMS-PNN-PZT压电厚膜材料为单斜相结构，晶粒尺寸在50-200nm之间。通过电学测试和压电性能测试，研究了PMS-PNN-PZT压电厚膜材料的电学性能和压电性能。结果表明，该材料具有较高的介电常数、极化强度和压电系数等优良的电学性能和压电性能。关键词：PMS-PNN-PZT；压电厚膜材料；制备；性能研究Abstract:ThispaperintroducesthepreparationmethodandperformanceresearchofPMS-PNN-PZTcompositepiezoelectricthickfilmmaterials.PMS-PNN-PZTpiezoelectricthickfilmmaterialswerepreparedbysol-gelmethodandheattreatmentprocess.ThestructureandmorphologyofthesampleswerecharacterizedbyX-raydiffractometer,scanningelectronmicroscopeandtransmissionelectronmicroscope.TheresultsshowedthatthepreparedPMS-PNN-PZTpiezoelectricthickfilmmaterialswereofmonoclinicphasestructureandthegrainsizewasbetween50-200nm.TheelectricalpropertiesandpiezoelectricpropertiesofPMS-PNN-PZTpiezoelectricthickfilmmaterialswerestudiedbyelectricaltestingandpiezoelectrictesting.Theresultsshowedthatthematerialhadexcellentelectricalpropertiesandpiezoelectricpropertiessuchashighdielectricconstant,polarizationintensityandpiezoelectriccoefficient.Keywords:PMS-PNN-PZT;piezoelectricthickfilmmaterial;preparation;performanceresearch