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PAGE-4-LL加热腔室一。组成部分：§Heatingbyinfraredradiators(Tungstenfilaments)§Horizontaloscillationduringheating§Simultaneousheatingandpumping§Accessfromtop§Watercooledchamber§Heating20°ì200°C§2-3mininload-lock§Stronginfluenceonprocess二、Load-LockparameterssettingsLoaLock-loadtemperaturesettingsNormalrange～150～200℃Normaltime～02:20mm:ss四、Load-LockLamps/zones2.312.12.232.46physicalheatingzones–alldrivenwiththesametemperaturesetpoint五、Load-LockParameters§Allsixzonesaredrivenbythesametemperaturesetpoint§Theheatup(allzones)isstronglydependentonEurothermsettings(PIDcontroller),mainlybytoparameters:Gainschedulingpoint(Gsp)andProportionalband2(Pb2)。②①①EurothermcontrollerislocatedonthecabinetclosetotheLoad-Lock。②AcloseuponaEurothermcontroller。六、Load-LockPIDcontroller(Gsp)FortuningtheLoad-LockheatuptohitthesetpointwelltheGspparameteriscentral.ThisparameterdeterminesthesetpointinCelsiuswherethepowergiventothelampsshouldbe100%.Belowthepoweris100%,abovethepowerisnolonger100%andregulatedwithaPID-feedbackloop.Goodtuning+/-3degreesCelsius(1°C~0.5Gsp).Typicalheatupcurveforsubstrate/module七、Load-LockPIDcontroller(Pb2)FortuningtheLoad-LockheatuptohitthesetpointwellthePb2parameteriscentral.ThisparametergivesmorefractionofpowerfromthesamefeedbackvoltageoutputregulatedwithaPID-feedbackloop.Increaseoftheproportionalbandgivesanincreaseofpowerputintothelamps.Goodtuning+/-3degreesCelsius(1°C~2/3Pb2).八、工艺气体1．PurgingN2名称氮气(N2)纯度5.0N工作压力1.3bar消耗<20slmVentingN2名称氮气(N2);工业纯度最小2.8工作压力6~8bar(0.6~0.8MPa;90~115psi)温度大约20°C3．压缩空气质量清洁,干燥,经5µm过滤工作压力6bar(0.6MPa;90psi)温度大约20°C最少要大于周围环境空气的露点2°C⑴PN2Purgingthegaspipewhenmaintenance.(当维护保养时，清洁气体管道)⑵GN2VentingtheULandLL.（吹扫UL和LL）Asgassourceofsomepneumaticvalve.⑶CDAAsthegassourceofcylinder(likegatevalve,pinsframe).Mostofthepneumaticvalve（气动阀）inTCO1200九、LL加热供电路径A：由变压器提供要求电压到我们厂房内配电柜。B：由厂房内配电柜到设备本身配电柜。C：由设备本身配电柜转换和控制后到相应负载。D：负载把电能转换成热能消耗。厂房内配电箱设备配电柜进线LLin加热用变压器电器柜内变频器和隔离开关电能转换Chamber电线连接交流进入直流输出
