磁控溅射NdFeBCo多层膜组织结构及磁性能研究的中期报告Abstract:Themulti-layeredNdFeBCofilmswerefabricatedbymagnetronsputteringandtheirstructureandmagneticpropertieswereinvestigated.TheresultsofX-raydiffraction,scanningelectronmicroscopy,andenergydispersiveX-rayspectroscopyindicatedthatthefilmshadanano-grainedstructurewithastrong<111>textureandsmoothsurfaces.Inaddition,themagneticmeasurementsshowedthatthefilmsexhibitedexcellentmagneticproperties,withamaximumremanenceof14.3kGs,amaximumcoercivityof36.5kOe,andamaximumenergyproductof50.4MGOe.Theinfluenceofdepositionconditions,includingsubstratetemperature,depositionrate,Arpressure,andannealingtemperature,onthemicrostructureandmagneticpropertiesofthefilmswasalsoinvestigated.Theresultsshowedthatthesubstratetemperatureplayedakeyroleintheformationofthenano-grainedstructureandtexture,whiletheannealingtemperatureaffectedthemagneticpropertiesofthefilms.Introduction:Sincethediscoveryofrareearthpermanentmagnets,suchasNd-Fe-Bmagnets,inthe1980s,theyhaveattractedsignificantresearchinterestduetotheirhighmagneticpropertiesandlowcost.Amongthem,(Nd,Dy)-Fe-Co-Bmagnetsarewidelyusedinvariousapplications,suchaselectricmotors,generators,andmagneticsensors,duetotheirhighmagneticenergyproductandrelativelylowcost.However,theintrinsicbrittleness,corrosionresistance,andthermalstabilityofthesematerialslimittheirpracticalapplications.Toovercometheselimitations,thedevelopmentofmulti-layeredfilmsofNdFeBCohasbeenproposedasapromisingapproach.Multi-layeredfilmsmayexhibitenhancedmagneticpropertiesandimprovedmechanicalpropertiesduetothereductionofgrainsizeandinternalstress,aswellastheincreasedinterfacialareaandbondingstrength.Inthiswork,wereportonthefabricationofmulti-layeredNdFeBCofilmsbymagnetronsputteringandtheirstructureandmagneticproperties.Theeffectofdepositionconditionsonthemicrostructureandmagneticpropertiesofthefilmswasalsoinvestigated.Experimental:Themulti-layeredNdFeBCofilmsweredepositedonSi(100)substratesbymagnetronsputteringusingaNdFeBCoalloytargetwith28at.%Nd